0020-70271 0020-70272 kaydon測量系統(tǒng)軸承
從機器人到機械拋光機再到光刻設備，Reali-Slim 和 Ultra-Slim 薄截面滾珠軸承為硅芯片制造過程中更小、更輕、更簡單的旋轉(zhuǎn)設備提供了節(jié)省空間的設計。我們的軸承可提供半導體制造行業(yè)所需的清潔度。
我們種類繁多的 Reali-Slim 和 Ultra-Slim 薄截面球軸承可以定制和優(yōu)化，以**限度地減少摩擦、放氣、污染、腐蝕和磨損，而不會犧牲精度。特殊的可選材料和潤滑劑可以允許高工作溫度、特定的真空水平、**小化的微粒產(chǎn)生以及對腐蝕性化學環(huán)境的耐受性。
Kaydon 薄截面軸承廣泛用于半導體生產(chǎn)應用：
晶圓步進機、探針臺、修邊機、洗滌器、拋光機和傳輸系統(tǒng)
濺射設備
取放機器人
測量系統(tǒng)
測試頭
定位器
檢驗設備
劃片設備
研磨設備
真空沉積系統(tǒng)
兆聲波清洗系統(tǒng)
薄膜沉積系統(tǒng)
化學氣相沉積系統(tǒng)
蝕刻系統(tǒng)
機械拋光機
大氣和真空機器人
機械手
甩干機
光刻
貼片機
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